hi all, i need a simulator for mems.....can you introduce me ?


On 6/8/10, antwi nimo  wrote:
> Suprem.
>
> Suprem will not give you DRIE per say but etching in general. I dont know if
> there is a specific simulation tool to deal with DRIE exclusive to etching
> in general.
>
> My experience is that SUPREM works just fine for simulating etching mems
> materials.
>
> regards,
> Nimo