durusmail: mems-talk: PDMS_ITO bonding problem
PDMS_ITO bonding problem
2010-06-11
PDMS_ITO bonding problem
hari krishnan
2010-06-11
Dear All,

I am trying to bond PDMS channels to Glass wafer with patterned ITO
Electrodes. However, the bonding is weak at the interface of PDMS and ITO
resulting in fluid  leaking through the interface.

I found some articles that describes about bonding PDMS and ITO which just
mentions about Oxygen Plasma exposure. But, this doesn't seem to work in my
case even with an exposure time in a range of 30 sec - 2 min.

Would appreciate if somebody could elaborate a detailed procedure for
bonding PDMS to ITO coated glass, epsecially PDMS to ITO??

Does the pretreamnet of ITO Glass/PDMS has anything to do with it?

Thanks,

Hari
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