Darren,
Polyimide adhesion to glass is easy. Use an adhesion
promoter very like using HMDS for resist adhesion to Silicon. In this
case use APTES. Bill Moffat
________________________________
From: mems-talk-bounces+bmoffat=3Dyieldengineering.com@memsnet.org on =
behalf of Darren Alvares
Sent: Thu 6/10/2010 4:27 PM
To: mems-talk@memsnet.org
Subject: Re: [mems-talk] P1-2525 remove from Si
Hi All,
Thanks for that. Any idea about polyimide to glass? Does that work the =
same way. In essence I just need some rigid substrate to start of with.
Cheers,
Darren Alvares
Graduate Student
Graduate School of Biomedical Engineering
University of New South Wales
UNSW Sydney NSW 2052 Australia
d.alvares@student.unsw.edu.au