Hi All, Thanks for that. Any ideas about polyimide to glass? Does that work the same way? In essence I just need some rigid substrate to start of with. Cheers, Darren Alvares Graduate Student Graduate School of Biomedical Engineering University of New South Wales UNSW Sydney NSW 2052 Australia d.alvares@student.unsw.edu.au > ---------- Forwarded message ---------- Hi Darren, I'd agree with Huihang on not using any glue layer such as HMDS if you want to have PI peeled off after develop. You may increase the develop time to 2x or 3x for the same purpose. Hope this helps, Paul