Joe,

here are some things to check: 1. are the devices actually released? 2. Are they
in contact already and therefor not moving? 3. Is there a short in one of your
traces to the capacitor? 4. Are you sure that 300V will move your parts? What
voltage do you expect them to deflect 1 um?


------ original message ------
Hi all,
    I'm working on a membrane mirror research, the mirror was fabricated by
anodic bonding of Pyrex 7740 glass to Si wafer.  My idea is, by applying voltage
between the Al electrodes patterned on glasss wafer and the Silicon membrane ,
the membrane will deform through the air gap under the electrostatic force. But,
terriblly, obviously no deformation was observed when even a 300 V voltage is
applied and the air gap is only 20 microns. I have tested the whole structure
and I'm sure that there is no short circuit between the membrane and the Al
electrode, now, I'm desperate and I hope anyone can save me.

 Joe