durusmail: mems-talk: Anodic Bonding of Pyrex to SOI With Released Structures
Anodic Bonding of Pyrex to SOI With Released Structures
2010-06-29
Anodic Bonding of Pyrex to SOI With Released Structures
yasser sabry
2010-06-29
Dear All,

I have an SOI with movable parts. When I bond to Pyrex using anodic bonding,
most of the movable structures either stuck to the fixed parts or to the
substrates.

Do anyone knows how to solve this problem or the appropriate bonding conditions?

I've used 600 V at 350 Celsius.

Thanks,
Yasser Sabry

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