I used to pattern Pyrex for bonding with SOI and it works OK ________________________________ From: Darren AlvaresTo: "mems-talk@memsnet.org" Sent: Tue, June 29, 2010 5:16:47 AM Subject: [mems-talk] Glass Substrate Or Not Hi All, I am toying with the idea of using glass as a substrate for my application. I was wondering if anyone has any insights into the challenges of doing this. * I will be spinning and baking polyimide PI2525. * I will then pattern photoresist AZ6632 * Evaporate Ti/Au 10/100nm and then perform lift-off using NMP. After some additional steps I would like to peel the polyimide with the device of the glass substrate. I am assuming the polyimide glass interaction should be the same as the polyimide SiO2 interaction. A few people have confirmed in earlier posts that I can do this. Thanks, Darren Alvares