durusmail: mems-talk: releasing layer for PDMS mold
releasing layer for PDMS mold
2010-06-30
2010-06-30
2010-07-01
2010-07-01
2010-07-01
2010-07-01
2010-07-01
releasing layer for PDMS mold
Maggie Q. Lai
2010-06-30
Hi,

I am trying to coat my glass master mold with with some releasing agent for
PDMS mold.

I found from a lof of papers that it is a common practice to treat the
substrate using fluorinated tricholosilane vapor in a vacuum desiccator to
form a monolayer on the substrate. But I tried with
(HEPTADECAFLUORO-1,1,2,2-TETRAHYDRODECYL)TRICHLOROSILANE (C10H4Cl3F17Si )
from Gelest, but even before I started pumping the desiccator the liquid
silane on the pippet tip and on the wall of the vial already became some
kind of white foam. Consequently the anti-adhesion layer didn't work well.

I am aware that the silane may react with the water in the air, but how can
I avoid that? Seems people always use it just in a fume hood, not a
glovebox. Is there something I am missing? Can you please give me some
solution?  Suggestion on alternative way for releasing layer is also
welcome.

Thanks.

Maggie
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