Hello everyone.

I am trying to perform a selective GaAs / AlGaAs etch.  I
recently put in a request to my cleanroom manager to
incorporate SF6 and BCl3 onto our PlasmaTherm SLR750
series ICP/RIE machine.  For some unexplained reason, I
was denied from putting SF6 and BCl3 onto our machine.
 Does anyone know of any safety or contamination issues
associated with these two gases?  Please help.

Sincerely,
John