John,

I use both BCl3 and SF6 everyday in my RIE.  You didn't state whether
you are etching GaAs and want to stop on AlGaAs or the other way
around.  I also need to know you Al%

Brent


John Montoya wrote:
> Hello everyone.
>
> I am trying to perform a selective GaAs / AlGaAs etch.  I
> recently put in a request to my cleanroom manager to
> incorporate SF6 and BCl3 onto our PlasmaTherm SLR750
> series ICP/RIE machine.  For some unexplained reason, I
> was denied from putting SF6 and BCl3 onto our machine.
>  Does anyone know of any safety or contamination issues
> associated with these two gases?  Please help.
>
> Sincerely,
> John