Air Liquide says the vapor pressure of SF6 at room temp. is 21.5 bar or
~310psi...  I don't know about your tools, but when I installed an RIE
system with SF6+CF4+O2 it called for process gas inlets of 15psi, thus our
delivery lines all the way back to the tank regulator were 15psi.  This is
well below the vapor pressure of SF6, so unless I'm missing something I
wouldn't think heated blankets are necessary for the SF6 line but please
correct me if I'm mistaken.

Regards,

Brian Stahl

--
Brian C. Stahl
Graduate Student Researcher
UCSB Materials Research Laboratory
brian.stahl@gmail.com / bstahl@mrl.ucsb.edu
Cell: (805) 748-5839
Office: MRL 3117A


On Sat, Jul 10, 2010 at 4:23 AM, Philip Lau wrote:

> You also need to keep the SF6 delivery pipe warm, using a heated blanket,
> to reduce the SF6 from condensing
> in the pipe, because of  low V.P
> ----- Original Message ----- From: "Glenn Silveira" 
> To: "General MEMS discussion" 
> Sent: Wednesday, July 07, 2010 5:58 PM
> Subject: Re: [mems-talk] SF6 / BCl3 issue
>
>
>  John,
>>
>> The BCl3 I understand the SF6 not so much. The BCl3 is a toxic and
>> corrosive
>> gas with a low vapor pressure. To facilitate BCl3 you will need a gas
>> cabinet with gas detection, sub-atmospheric regulator, temperature
>> controlled gas lines and or the delivery system installed very close to
>> the
>> tool (i.e. in the clean room.)
>>
>> Good luck with facilities and safety.
>>
>> Regards,
>> Glenn
>>
>>
>> -----Original Message-----
>> From: John Montoya [mailto:redshift@unm.edu]
>> Sent: Tuesday, July 06, 2010 6:38 PM
>> To: mems-talk@memsnet.org
>> Subject: [mems-talk] SF6 / BCl3 issue
>>
>>
>> Hello everyone.
>>
>> I am trying to perform a selective GaAs / AlGaAs etch.  I
>> recently put in a request to my cleanroom manager to
>> incorporate SF6 and BCl3 onto our PlasmaTherm SLR750
>> series ICP/RIE machine.  For some unexplained reason, I
>> was denied from putting SF6 and BCl3 onto our machine.
>> Does anyone know of any safety or contamination issues
>> associated with these two gases?  Please help.
>>
>> Sincerely,
>> John
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>
> _______________________________________________
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