Dear Chen,

               You can try dry thermal oxidation and then etching the oxide with
the help of BHF.
I am not very sure with this but feel it may solve your problem.

with regards
jaibir

On Tue, 03 Aug 2010 19:29:01 +0530  wrote:

Dear all,

I am using lithogrphy and etching process to define silicon NW.
the cross section is close to a square (70nm*70nm).
I am wondering whether there is any way to smooth the edge of NW to make the
cross section like a circle or semicicle, which means I want to make a round
instead of a sharp edge at least on the top surface.

any comments are welcome.

sincerely

Yu CHEN


Jaibir Sharma
Reasearch Scholar(PhD)
Electrical Department,
IIT Madras,
Chennai - 36
INDIA

Phone:044-22575444(off)
      09445311513(home)