Darren, Are you sure that you put in contact with the resist the right side of the transparency mask? That is, with the ink-side down? It can sound like a silly question, but i've seen a lot of experimented people make this kind of mistake. And your photography looks very compatible with this kind of error. Another possible cause of separation between the mask and the substrate are the elevation on the edges of the resist generated during the spinning, specially when you are working with thick resists. Did you remove the edges? Cheers, Karim