durusmail: mems-talk: AP300 Recipe
AP300 Recipe
2010-08-24
2010-08-24
AP300 Recipe
Bill Moffat
2010-08-24
For the absolute best results vacuum dehydrate using alternate vacuum
hot Nitrogen purges.  Then while in the vacuum chamber and still
dehydrated, heat the AP 300 to produce a vapor and introduce to the
vacuum chamber.  The temperature and the volume of AP 300 will determine
the vapor presuure and from this you can deduce the amount of time the
product needs to see the vapor.  If you dehydrate and allow the product
to see air before it sees the AP300 some level of rehydration will take
place which means some level of poor adhesion.


Bill

-----Original Message-----
From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org
[mailto:mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On
Behalf Of Ahmed Amin
Sent: Tuesday, August 24, 2010 2:29 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] AP300 Recipe

>From previous posts, it seems that AP300 can be used to enhance Su8
adhesion to glass. Does anyone know what the process parameters for
AP300 are? Should I bake it on a hot plate after spinning? If so, what
temperature and for how long?

Thanks!
Ahmed
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