Dear All,

Is there a recipe to etch SiO2 isotropically using RIE?  I use to do wet
etching, but my Cr/Au (8nm/150nm) film peeled off after 2mins 1:10 HF etching.

I was able to do wet etching without peeling off for Cr/Au (5nm/50nm) film.
Thick films bring me trouble.

Thanks,
Hao