Hi, etch time is 2 hours

S1813 recipe is the following

-spinning HMDS
-spinning S1813
-soft bake (3 min at 115 deg)
-exposure (150 mJ)
-Develop (MF319)
-hard bake (15 min 1 at 115 deg).

I always use this recipe for S1813 and it always worked for 2 hours
etching time.

Thanks,
Andrea


> Hi,
> How long do you etch with BHF? And what is your baking recipe for S1813?
> It could be that you are etching for too long and the resist is attacked
> too much by BHF.
>
> Cheers,
> Marcel