Andrea,
       When etching 17,000 Angstroms of SiO2 for about 15 minutes in BHF
I got constant resist lift.  When I used Vacuum Vapor Prime I tested
pieces that were 7 days old with no problems.  I can offer free tests
that will survive weeks of shipping. bmoffat@yieldengineering.com.

Bill Moffat, CEO
Yield Engineering Systems, Inc.
203-A Lawrence Drive, Livermore, CA  94551-5152
(925) 373-8353

www.yieldengineering.com


-----Original Message-----
From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org
[mailto:mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On
Behalf Of Marcel Spurny
Sent: Tuesday, September 07, 2010 9:09 AM
To: mazzolari@fe.infn.it; General MEMS discussion
Subject: Re: [mems-talk] cleaning problem

Hi,
How long do you etch with BHF? And what is your baking recipe for S1813?

It could be that you are etching for too long and the resist is attacked
too much by BHF.

Cheers,
Marcel