durusmail: mems-talk: releasing cantilever beams without release holes
releasing cantilever beams without release holes
2010-09-17
2010-09-18
2010-09-20
2010-09-21
releasing cantilever beams without release holes
nahid vahabi
2010-09-17
Hello folks,

Just wondering if any of you guys have released a structure like  cantilever
beams without release holes. There was a mistake in the mask and now we try to
find a good recipe for dry or wet etch to release the structure.

Any comments are appreciated.

Nahid

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