Hi Guys,

Thanks a lot for your replies and help.

I changed the sputtering recipe from Argon 50sccm to 30sccm @ 500W and
the adhesion improved remarkably and the deposition rate is accelerated
to 16nm/min.

kind regards

Salam R. Gabran, MASc.
Research associate, PhD. Candidate
Center for Integrated RF Engineering
(CIRFE) Group
ECE Dept., University of Waterloo,
200 University Avenue West
Waterloo, Ontario, N2L3G1
cell.: 519-729-8066
Web: www.ece.uwaterloo.ca/~sgabran