What temperature and time can the PZT withstand?


-----Original Message-----
From: Phil Rayner 
To: MEMS@ISI.EDU 
Date: Saturday, October 17, 1998 3:46 PM
Subject: Bonding bulk PZT to Silicon/Other


>Hello everybody,
>
>I'm building a piezo micro motor, and I'm looking for methods of bonding
bulk
>PZT to a stainless steel or silicon substrate.
>These can then be lapped/ precision ground down to required thickness (30um
>or so), giving much better propeties than thin or thick film PZTs, which we
also
>do here.
>Does anybody have any experience of bonding wafers with gold-silicon (or
>another type of) diffusion bonding, sputtering solder layers down or using
a sol-
>gel intermediate layer.
>Really, I'm looking for a way to avoid epoxy bonding (which could end up
giving
>a bond as thick as the PZT), so all ideas will be very much appreciated.
>
>Thanking you in advance
>
>Phil Rayner
>