Hi everyone:

For some PECVD experiments, I plan to attach a thermocouple in intimate
contact with the wafer.  The thermocouple reading is to be stored in a small
data logger.  Does anyone know where I can get a data logger that is small
and can be placed inside the vacuum chamber?

Thanks and regards,

Johnson Wong
Research Consultant
Solar Energy Research Institute of Singapore (SERIS)
National University of Singapore (NUS)