durusmail: mems-talk: AMMT KOH etch wafer holder
AMMT KOH etch wafer holder
2010-09-30
2010-10-01
2010-10-01
2010-10-04
AMMT KOH etch wafer holder
Bhargav Nabar
2010-10-01
Thank you for your suggestion Mr Kuijpers. Could you please comment on ease
of removal of the parylene layer. What solvent do you use and does
it require any agitation (slow rotating or ultrasonic?). Also how was you
experience with the silicet clamp?

Thank you once again.
Bhargav Nabar
UT Arlington Nanofab
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