durusmail: mems-talk: TMAH+Triton surface quality
TMAH+Triton surface quality
2010-10-14
2010-10-14
TMAH+Triton surface quality
Andrea Mazzolari
2010-10-09
Hi Prem,

i've read your paper "Complex three-dimensional structures in Si{1 0 0}
using wet bulk micromachining", really a nice job!

Just a question: which is the surface quality of (100) sufaces etched in
TMAH+Triton ? Is it possibile to achieve a (100) mirro-like surface ?

Best regards,
Andrea
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