Rob, we have been using pyrex wafers up to 5mm in thickness bonded to 4" silicon wafers as hot embossing masters in the past. The process takes a bit longer, mainly due to the low thermal conductivity of the pyrex and needs higher voltages but otherwise there are no fundamental reasons why this should not work. With best regards Dr. Holger Becker microfluidic ChipShop GmbH Carl-Zeiss-Promenade 10 D-07745 Jena Germany Tel. .+49 (0) 36 41 347 05 80 Fax: +49 (0) 36 41 347 05 90 Geschäftsführerin: Dr. Claudia Gärtner Sitz der Gesellschaft: D-07745 Jena, Germany Amtsgericht Jena: HRB 209251 USt.-IdNr.: DE 221812444 -----Ursprüngliche Nachricht----- Von: mems-talk-bounces+hb=microfluidic-chipshop.com@memsnet.org [mailto:mems-talk-bounces+hb=microfluidic-chipshop.com@memsnet.org] Im Auftrag von Robert MacDonald Gesendet: Donnerstag, 14. Oktober 2010 16:48 An: mems-talk@memsnet.org Betreff: [mems-talk] pyrex wafer thickness for anodic bonding Wondering if anyone has any experience anodic-bonding pyrex wafers to silicon wafers, where the pyrex is thicker than normal. For a 100mm wafer typical thicknesses I've worked with are in the 400-600um range. Has anyone had experience working with wafers 2 or 3 times thicker? Rob MacDonald Shearwater Scientific