Hello,

We've encountered a serious damage to the wafers surfaces during SC1 cleaning
process.  A picture of a damaged silicon wafer after the cleaning process is
attached.
This damage occurs only for wafers from a certain vendor.

It seems that wafers from other vendors are damaged as well if being cleaned in
the same solution after the said damaged wafers.

Have anyone encountered such a problem before? Can you suggest what might be the
cause?

Thanks,

Evgenia