Hello, i m wondering how the KMPR 1000 DRIE performance as a mask on Silicon instead of SU8 ? For my applications i achieve 1:10 selectivity for Si:SU8, and how about the KMPR 1000? i haven't bought it yet. I have already search it on internet but couldn't find anything. if there is any information i need for that. Thank you Ragip Abdullahoglu Biomems Lab. Istanbul Technical University