Polyimide swells in water, bases and organic solvents though we've often
done lift-off on it with no problems in acetone.  If you bake it (say
115C for 5 min) after the lift-off the swelling should go down.  Of
course, to maximize dimensional stability you should fully cure it.  If
you have a "dirty" tube furnace available, you can fully cure it in
there.  We've also cured it under a nitrogen blanket on a hotplate.

Good luck,

  Michael

>>> James Paul Grant  11/2/2010 12:22 PM >>>
Hello all,

Doeas anyone have any experience of partially inidized polyimide? I
have been using HD Microsystems PI2545 polyimide and been cutting a few
corners by doing the final cure at 180oC in a nitrogen purged convection
oven. However the PI2545 data sheets says to do a final cure for 1 hour
at 400oC.

In subsequent lithography steps I have used lift-off using acetone and
noted that the polyimide seems to swell in certain sections. After
immersing the sample in acetone for 3 days at room temperature there
are 200-300 nm thick ridges visible all over the sample.

Anyone got any thoughts? I can provide more details/pictures if
necessary.

Thanks,

James

--
Dr. James Paul Grant
Postdoctoral Research Associate
Microsystems Technology Group
76 Oakfield Avenue Room 205
School of Engineering
University of Glasgow
Glasgow
Scotland
G12 8LS

Telephone: +44(0)141 330 6690

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