Hi Guys, I have 200nm chrome between 2 silicon-oxide layers. the top oxide was patterned and etched by RIE to expose the underlying chrome. However, the chrome can not be etched. Any opinions ? Can i blame it to chrome diffusion into the top oxide layer and created non-etchable film ? Is there a way to etch chrome oxide ? i tried gold etchant as recommended by a memsnet user, but that didn't work. thanks Salam R. Gabran, MASc. Research associate, PhD. Candidate Center for Integrated RF Engineering (CIRFE) Group ECE Dept., University of Waterloo, 200 University Avenue West Waterloo, Ontario, N2L3G1