durusmail: mems-talk: Etching BCB or UV Glue
Etching BCB or UV Glue
2010-11-22
Etching BCB or UV Glue
Vijay Rajaraman
2010-11-22
Hello,

Has anyone successfully etched (selective or blanket) 10 microns of
cured BCB (cyclotene) or UV glue, landing on either Si or Al, without
residues ?

In case of selective etching, the preferred masking material is photoresist.

Is there any good reference material on etching such thicker polymer layers?

Do let me know.

Many thanks,
Vijay
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