You can use high vacuum wax. You can heat the sample holder on hot plate
 to apply the wax and cool it down before loading into the IBE system.
Make sure a very thin layer of wax is uniformly applied on back side of
the sample. Otherwise, your sample will be cracked during IBE. The wax
is soluble in acetone.

Good luck.


Pramod Gupta
21084 Red Fir Court
Cupertino, CA 95014
Phone: (408) 253-1646

--- On Tue, 11/23/10, Grimm, Dr. Daniel  wrote:

From: Grimm, Dr. Daniel 
Subject: [mems-talk] Glue for ion beam etching
To: "General MEMS discussion" 
Date: Tuesday, November 23, 2010, 8:18 AM

Hi,

we have an Argon ion beam etcher from Roth & Rau. In this etching
machine, the samples are upside-down. In order to prevent them from
falling into our turbo, we are using silver glue. However, for obvious
reasons (a lot of contamination), I want to change the glue.

Does anyone have experience with a high vacuum glue which is thermal as
well as electrical conductive and which is easy to remove with normal
solvents (acetone, NMP, DMSO, KwikStrip)?

Best wishes
Daniel