Hi all, I am a newcomer to MEMS

My bio-sensor design required bonding the PDMS to the glass substrate (piranha
treated) that consists the Au/Ti thin films on it (some area are glass, some are
Au-covered). I heard that using oxygen plasma can enhance the bond of PDMS -
glass but seems there is not a strong bond on the substrate that have a thin
film, is it right ? How could I maximize the bonding strength in my case ?

Thank you.