Would a peltier device work?  Some have built-in thermocouples now.

-Alex

On 11/30/2010 6:58 PM, Xiaohui Lin wrote:
> Hi guys:
>
>       I am looking for a heating blanket sheet for in-situ heating. Pretty
> much like the silicon heating blanket. But I hope it can be more solid (with
> metal surface like the hot plate) and the temperature should be able to rise
> up to 180 degree C.  Would be better is controllable.
>
>       size of a 3" wafer.
>
> Anyone has ideas about the vendors that provide such kind of thing?
>
> Thanks
>
>
> Xavier from UT