durusmail: mems-talk: how to drill a hole in a silicon wafer
how to drill a hole in a silicon wafer
2010-12-06
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how to drill a hole in a silicon wafer
Petru Lunca Popa
2010-12-05
Hi,

I have just an ordinary Si/SiO2 commercial wafer and I want to to
put a hole in it . The shape is not so important. Area should be around one
mm squared or less.

Any ideea how to do this without breaking the wafer?
Mechanical or chemical methods?

Thank you
Petru
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