The term is Dry film Photo Resist.   We use "Riston EM100" from Dupont.
You laminate it onto wafers and do your normal photo processes.   It's a
negative resist, good for thick structures.    I'm sure there are many other
brands, but search on the term "Dry Film"  rather than tape and you should
be ok.  I'm not sure if there are Positive resist versions  (I'd like to
find one if there are).

Good Luck.

Jason Tauscher
Silicon Designs, Inc.
Jason@SiliconDesigns.com
(425)391-8329


----- Original Message -----
From: Angela Rasmussen 
To: 
Sent: Thursday, May 13, 1999 7:45 AM
Subject: Photoresist Tape


>
> Anyone know of something called photoresist "tape"?  Someone described it
> to me as being patternable photoresist, but in a "tape" solid form instead
> of that of liquid.  Please let me know where it can be purchased, and if
> such a product even exists.  Thanks.
>
> -Angela Rasmussen
> The George Washington University
> The Institute of MEMS and VLSI Technologies
>
>
>
>