Toluene?

> From: omsuwal@gmail.com
> Date: Wed, 8 Dec 2010 11:07:45 +0900
> To: mems-talk@memsnet.org
> Subject: [mems-talk] How to strip off Apiezon (Black) wax?
>
> Hi friends,
>
> I wonder whether some of you have used apiezon (black) wax on Si wafers. I
> applied on a silicon surface to protect the surface while wet etching. I am
> trying to remove the wax in easy method. I would be glad if someone knows
> the easy and clean room friendly method to remove the wax from Si surface.. I
> have tried the following methods:
>
> 1. Boiling acetone / Methanol / IPA - It takes very long time and cannot
> remove well.
>
> 2. Piranha solution - It removes well but produces lot of unpleasant fumes
> and contaminates the labwares. It is no problem if wax is little amount. (
> but I applied on a whole 4 inch wafer)
>
> 3. TCE ( I hate to use TCE).
>
> Any other methods are acknowledged.
>
> Thank you
>
> Om