Hi Om,

Apiezon's website suggests hydrocarbon or chlorinated solvents:

http://www.apiezon.com/uploads/apiezon/DocumentLibrary/TechnicalDatasheets/Apiez
on%20Wax%20W%2C%20W40%20%26%20W100%20Vacuum%20Sealing%20and%20Mounting%20Waxes%2
0Technical%20Datasheet.pdf

I used to do this with TCE and it worked fine. I now use Chlorobenzene and that
works fine too.

I hope this helps.

Emre

----------
Mustafa Emre Karagozler
Graduate Student
Carnegie Mellon University
Department of Electrical & Computer Engineering
5000 Forbes Avenue
Pittsburgh, PA 15213

On Dec 7, 2010, at 9:07 PM, Om Suwal wrote:

> Hi friends,
>
> I wonder whether some of you have used apiezon (black) wax on Si wafers. I
> applied on a silicon surface to protect the surface while wet etching. I am
> trying to remove the wax in easy method. I would be glad if someone knows
> the easy and clean room friendly method to remove the wax from Si surface. I
> have tried the following methods:
>
> 1. Boiling acetone / Methanol / IPA - It takes very long time and cannot
> remove well.
>
> 2. Piranha solution - It removes well but produces lot of unpleasant fumes
> and contaminates the labwares. It is no problem if wax is little amount. (
> but I applied on a whole 4 inch wafer)
>
> 3. TCE ( I hate to use TCE).
>
> Any other methods are acknowledged.
>
> Thank you
>
> Om