durusmail: mems-talk: spin coater vacuum path
spin coater vacuum path
2010-12-09
2010-12-09
2010-12-09
2010-12-09
2010-12-09
2010-12-10
2010-12-10
2010-12-10
2010-12-10
2010-12-09
2010-12-10
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2010-12-13
2010-12-14
spin coater vacuum path
Jia Yao
2010-12-09
Thank you Andrew for your suggestion. I have taken the parts out and had
them cleaned but still it shows insufficient vaccum value v~6 or 7. What
else could I possibly check? Thank you!

On Thu, Dec 9, 2010 at 9:03 AM, Andrew Sarangan  wrote:

> Probably the blockage has moved further downstream, and into the
> vacuum solenoid. Try removing the solenoid and cleaning it.
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