Jia, Some of the units have a small vacuum buffer (tank). When resist it sucked in, it sometimes goes there and blocks the entrance. If you have one, remove it, clean and try again. Also, the chuck shaft has vacuum seals. If you misplaced or damaged them, the vacuum will leak. shay -----Original Message----- From: mems-talk-bounces+shay=mizur.com@memsnet.org [mailto:mems-talk-bounces+shay=mizur.com@memsnet.org] On Behalf Of Brad Cantos Sent: Thursday, December 09, 2010 9:30 PM To: General MEMS discussion Subject: Re: [mems-talk] spin coater vacuum path Jia, I'm not familiar with this particular Laurel unit, but most spinners have a vacuum interlock switch that prevents spinning if there is insufficient vacuum at the chuck. This can often get stuck if photoresist gets down the shaft. If your switch is making partial contact, it could explain some of the symptoms that you are seeing. I would look for this interlock switch and clean it just as you did the solenoid. Brad Cantos