Angela,

I think you are refering to what is called Dry Film Resist. Dry
film resist is commonly used in printed circuit board industry
and can cover a much larger area than spin photoresist. However,
thickness is needed to hold the film together so film photoresist
typically comes in thickness of around 50 microns, and is applied
to a planar area by hot roll lamination. Resolution is also
lower. The smallest line/space that a state of the art PCB
company can mass produce are 100 micron/100 micron.

The following web sites, along with many other sites, explain
more about dry film photoresist. Hope that helps.

http://www.dupont.com/pcm/techinfo/laminate/optimize.html

http://www.dupont.com/pcm/techinfo/laminate/hotroll.html

Patrick Cheung, research scientist   Xerox PARC, MS 35-1674
(O) 650-812-4338 (FAX) 650-812-4719   3333 Coyote Hill Road
pcheung@parc.xerox.com                  Palo Alto, CA 94304
           "pcheung can mems, and so can you!"
>>                                                       >>

On Thu, 13 May 1999, Angela Rasmussen wrote:


Anyone know of something called photoresist "tape"?  Someone described it
to me as being patternable photoresist, but in a "tape" solid form instead
of that of liquid.  Please let me know where it can be purchased, and if
such a product even exists.  Thanks.

-Angela Rasmussen
The George Washington University
The Institute of MEMS and VLSI Technologies