Have you tried a thin telfon layer, or perhaps poorly adhesive metal ? -----Original Message----- From: seyeda@ualberta.ca [mailto:seyeda@ualberta.ca] Sent: Mon 13/12/2010 17:21 To: General MEMS discussion Subject: Re: [mems-talk] PDMS fine structures Hi, You may want to silanize the master each time before pouring PDMS. Good luck. Seyed