durusmail: mems-talk: "ARCE®" Process (Aspect Ratio Controlled Etching)
"ARCE®" Process (Aspect Ratio Controlled Etching)
2010-12-22
"ARCE®" Process (Aspect Ratio Controlled Etching)
杜 彦召
2010-12-22
Hi all:

Anybody have experience with "ARCE"?  Process (Aspect Ratio Controlled Etching)
which can eliminate the etch depth difference. I am now working hard to
eliminate the Aspect Ratio Etch Effect.

Andrew
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