Dear Angela

You can buy this photoresist to dupont. Commercial name is Riston 4700
series. You find it in various thicknesses.
Process and applications have been described in :

V.L Spiering and al, Planarization and fabrication of bridges across deep
grooves or holes in silicon using a dry film photoresist followed by an etch
back. J.Micromech. Microeng. 1995 5 pp112 114

H.Lorenz and al, Low-cost technology for multilayer electroplated parts
using laminated dry film resist. Sensors and actuators A 53 (1996),
pp.364-368

full characterization in :

H.Lorenz, thèse 1770, (1998) bibliothèque de l'école polytechnique fédérale
de Lausanne (EPFL), Switzerland.

Best regards

******************

Hubert Lorenz
MIMOTEC SA
1950 SION
Switzerland

+41 27 329 08 36
+41 27 329 08 37 fax
*************************

-----Message d'origine-----
De : Angela Rasmussen 
À : MEMS@ISI.EDU 
Date : vendredi, 14. mai 1999 06:26
Objet : Photoresist Tape


>
>Anyone know of something called photoresist "tape"?  Someone described it
>to me as being patternable photoresist, but in a "tape" solid form instead
>of that of liquid.  Please let me know where it can be purchased, and if
>such a product even exists.  Thanks.
>
>-Angela Rasmussen
>The George Washington University
>The Institute of MEMS and VLSI Technologies
>
>
>
>