Hello Enrique,

the Wafer carriers from the transport boxes are made of pp. It is resistant to
many chemicals, but has a density < 1. That means it floats in a process bath.
You can get the same carriers as process carrier made of PFA (density >2) the
standard carriers are for 25 Wafers. One supplier for example is entegris.

Best regards,
Ben


-----Ursprüngliche Nachricht-----
Von: Enrique San Andrés Serrano [mailto:esas@fis.ucm.es]
Gesendet: Freitag, 14. Januar 2011 09:26
An: ivan@labfer.usu.ru; 'General MEMS discussion'
Betreff: Re: [mems-talk] Single wafer wet processing tray/basket

Hi,

I'm also interested in purchasing this kind of chemical resistant trays, but to
RCA clean ~10 wafers simultaneously. The only company that we have found is
Tousimis, which have a wafer holder for 5 wafers. Do any of you know of any
other supplier?

About the wafer shipment box, do you know if it withstands RCA cleaning?
(H2O2:NH4OH:H2O and H2O2:ClH:H2O at 80ºC)

Thanks!

Enrique San Andrés.
UCM, Spain.