Are you using the turbopump during the RIE process?
I normally use the primary pump (rotary) to evacuate the RIE etching
products, with a by pass in the turbopump.



El 14/01/2011 4:58, zhanggeng escribió:
>   Hi all,
>
>       We are using a RIE machine(Model:PX-1000, March company) for SiNx dry
etching (SF6+O2). The vaccum is achieved by a turbopump (Base presure of ~1
mTorr). The problem is that the turbopump is easily destroyed by the residual
materials produced during the etching process.
>
> Here are our questions:
>
>       1) whether the turbopump is not so suitable for this dry etching
process, or any special turbopump should be used here.
>       2) Can we use a oil pump to replace the turbopump? any filter (what
kind?) should be used to avoid the impact of the residues?
>       3) whether molecular pump can be used in this vaccum system. Our oil
pump seems much weaker than the turbopump(pump speed:16.6 m3/h<  30 m3/h).and
how to set up this vaccum system?
>
> It will be very helpful and appreciated if someone can share the experience on
the vaccum system.
>
> Thank you!
>
> Geng Zhang