Hi,

Sorry, I've made a mistake, taking turbopump for scroll pump (dry vacuum pump) .
We only use the scroll pump for evacuation, even during the RIE process.
What  kind of turbopump and rotary pump you are using? whether need to consider
the corrosion resistance

At 2011-01-15 03:05:29，"Javier Sesé"  wrote:

>Are you using the turbopump during the RIE process?
>I normally use the primary pump (rotary) to evacuate the RIE etching
>products, with a by pass in the turbopump.