Has anyone had any experience looking at chemical compatibility of lithium
tantalate substrates with wet etching chemicals? I did some simple
compatibility tests, testing KI gold etchant and acetic chrome etchant, and
found that some decent sized pits were created into the substrate (600Å
deep, several microns in diameter). I wasn't expecting any reaction, since
the only listed etchants I saw for the material were HNO3 and HF mixtures
and HF.

I actually tested each etchant consecutively, so I was going to go back and
retest to determine which it was, but was curious if anyone knew the answer..

Sincerely,
Dave