Hi Brian, Thanks so much for the advice, pre-baking and pre-sputtering will definitely help. Thanks, Yassine, Ait El Aoud On Fri, Jan 28, 2011 at 1:43 PM, Kagan Topalli < ktopalli@electroscience.osu.edu> wrote: > Dear Yassine, > > It is partly mentioned by some other colleagues replying this post. I > recommend to make longer pre-sputtering sessions "at higher powers" before > opening the shutter. It helps to clean the surface of the target. It may > improve the quality of the deposition. Dehydration of the substrates before > sputter coating may also bring an improvement. > > Best, > Kagan