....you could also try to use Vapour HF techniques if you had equipment
(Primaxx or MEMSSTAR).

Regards,

M.Sc. Denis Petrov
Production engineer

MEMS Foundry Itzehoe GmbH,
Fraunhoferstrasse 1,
25524 Itzehoe
Germany

Phone: +49 (4821) 17 45 54
Fax: +49 (4821) 17 42 50
e-mail: denis.petrov@memsfoundry.com


2011/2/14 Babis 

> Hey, All
>
> I have recently purchased Thermal Oxide Si (Highly doped) wafers in order
> to prepare Organic TFT samples. However the wafers are double side deposited
> with SiO2. In order to make contact on the un-polished side, I suppose I
> have to etch SiO2. What methods do you propose for that purpose. Is there
> anything to watch out in order to achieve better results?
>
> Thank you in advance!