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Hello,=20

I have a general question about deep rie.=20
Can anybody give me an idea about possible feature size of deep rie?=20
I want to know the "minimum achievable" line width (trench and wall) vs. =

different depth with resonable roughness control.=20
It might be process dependent, which will=20
be an interesting issue for comparison.=20
Thanks a lot in advance.

Junghoon Lee
Micromanufacturing Lab. UCLA =20

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Hello, 
 
I have a general question about deep =
rie.=20

Can anybody give me an idea about possible feature =
size of=20
deep rie? 
I want to know the "minimum=20
achievable" line width (trench and wall) vs. 
different depth with resonable =
roughness=20
control. 
It might be process dependent, which will =

be an interesting issue for comparison. 
Thanks a lot in advance.
 
Junghoon Lee
Micromanufacturing Lab. UCLA  

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