If bt negative angle you mean overhang for lift off. You can not achieve it by using negative resist. Bill Moffat -----Original Message----- From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mailto:mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On Behalf Of caozijian.cn@gmail.com Sent: Wednesday, February 23, 2011 3:48 PM To: Xiaohui Lin; General MEMS discussion Subject: Re: [mems-talk] Image Reversal resist Maybe you can choose SU-8 2005? I think that if you choose any negative resist, you can perform negative angle.